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Demo units available for loan! We offer cleaning methods tailored to various processes (hoop compatibility available).
The sheet-type automatic cleaning device is a cleaning device that addresses spray-type cross-contamination in a sheet format. It is provided with cleaning methods tailored to various processes (hoop compatibility available). For more details, please contact us.
Customization is okay! We offer quick responses and after-sales support unique to manufacturers.
The "RCA Wafer Cleaning System" is an automatic cleaning device primarily based on the RCA cleaning method, widely adopted as a highly reliable cleaning method. With a "3-axis multi-joint clean robot" for wafer transport and "FOUP" used for loaders and unloaders, it achieves cleaning in a non-particle environment. 【Features】 ■ Quick response from estimates to customization ■ Support for our own equipment as well as other manufacturers' equipment ■ Detailed response to sudden specification changes *For more details, please download the catalog or contact us. 【Exhibition Information】 SEMICON Japan Location: Tokyo Big Sight Period: December 13-15, 2017 Booth Number: 3509, East Hall
Demo units available for loan! This is a sheet-type cleaning device that can accommodate up to Φ300.
This machine is a dip-type single-sheet processing machine that vertically lifts the workpiece in the loader section and performs each processing step with a transport robot. After the final cleaning is completed, the workpiece is returned horizontally by the inversion mechanism, and spin drying is performed. It is a cassette-to-cassette cleaning machine. For more details, please contact us.
Customization is OK! We offer quick responses and after-sales support unique to manufacturers.
The "RCA Wafer Cleaning System" is an automatic cleaning device primarily based on RCA cleaning, widely adopted as a highly reliable cleaning method. It features a "3-axis multi-joint clean robot" for wafer transport and a "FOUP" used in the loader and unloader, achieving cleaning in a non-particle environment. 【Features】 ■ Quick response from quotes to customization ■ Support for not only our own equipment but also for other manufacturers' equipment ■ Detailed response to sudden specification changes *For more details, please download the catalog or contact us.
